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Internal energy distribution change of sputtered Al atom under several hundreds of eV oxygen ion-beam bombardment by resonant laser ionization sputtered neutral mass spectroscopy
Hayashi, Shun-Ichi, Kubota, NaoyoshiVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3168560
File:
PDF, 533 KB
english, 2009