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Simultaneous readout of multiple microcantilever arrays with phase-shifting interferometric microscopy
Kelling, Sven, Paoloni, François, Huang, Juzheng, Ostanin, Victor P., Elliott, Stephen R.Volume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3212667
File:
PDF, 888 KB
english, 2009