Structure of ultrathin SiO[sub 2]/Si(111) interfaces...

Structure of ultrathin SiO[sub 2]/Si(111) interfaces studied by photoelectron spectroscopy

Keister, J. W., Rowe, J. E., Kolodziej, J. J., Niimi, H., Tao, H.-S., Madey, T. E., Lucovsky, G.

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Volume:

Year:

1999

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.581805

File:

PDF, 437 KB

english, 1999

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