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Porous polycrystalline silicon conductivity sensor
Han, P. G., Wong, H., Poon, M. C., Wang, N.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581899
File:
PDF, 481 KB
english, 1999