[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Out-of-plane micro triple-hot-wire anemometer based on Pyrex bubble for airflow sensing
Liu, Shuwei, Pan, Shanshan, Xue, Fei, Lin, Nay, Liu, Haobin, Miao, Jianmin, Norford, Leslie K., Lim, H.B.Year:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765756
File:
PDF, 1.27 MB
english, 2014