Growth mechanism of amorphous silicon by evaporation containing hydrogen from radio-frequency discharge
Pang, Da-Wen, Cui, Shu-Fan, Mai, Zhen-Hong, Chen, Joseph H.Volume:
61
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.338162
File:
PDF, 541 KB
english, 1987