Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 1
Room-temperature capillary-imprint lithography for making micro-/nanostructures in large areas
Ye, Xiangdong, Ding, Yucheng, Duan, Yugang, Liu, Hongzhong, Lu, BinghengVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3290753
File:
PDF, 905 KB
english, 2010