Temperature dependence of stresses in chemical vapor...

Temperature dependence of stresses in chemical vapor deposited vitreous films

Shintani, Akira, Sugaki, Shojiro, Nakashima, Hisao
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Volume:
51
Year:
1980
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.328277
File:
PDF, 844 KB
english, 1980
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