Predictive study of a plasma structure and function in...

Predictive study of a plasma structure and function in reactive ion etcher driven by very high frequency: Validity of an extended two-dimensional relaxation continuum model

Maeshige, Kazunobu, Hasebe, Masao, Yamaguchi, Yukio, Makabe, Toshiaki
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Volume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1310180
File:
PDF, 801 KB
english, 2000
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