[IEEE 2011 Semiconductor Conference Dresden (SCD) - Dresden, Germany (2011.09.27-2011.09.28)] 2011 Semiconductor Conference Dresden - Monitoring atomic layer deposition processes in situ and in real-time by spectroscopic ellipsometry
Junige, Marcel, Geidel, Marion, Knaut, Martin, Albert, Matthias, Bartha, Johann W.Year:
2011
Language:
english
DOI:
10.1109/scd.2011.6068739
File:
PDF, 1.09 MB
english, 2011