Athermal annealing of Si-implanted GaAs and InP

Journal of Applied Physics 2003 Vol. 94; Iss. 1

Athermal annealing of Si-implanted GaAs and InP

Rao, Mulpuri V., Brookshire, J., Mitra, S., Qadri, Syed B., Fischer, R., Grun, J., Papanicolaou, N., Yousuf, M., Ridgway, M. C.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1576896
File:
PDF, 404 KB
english, 2003
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