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Effect of process conditions on the microstructural formation of dc reactively sputter deposited AlN
Ekpe, Samuel D., Jimenez, Francisco J., Dew, Steven K.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3478670
File:
PDF, 872 KB
english, 2010