Hardware Design Optimization and Process Control for a Low Friction Coefficient Substrate and Film: A Case Study in the Semiconductor Industry
Fumagalli, Francesco, Marelli, Sara, Angilletta, Domenico, Capellini, Stefano, Sgroi, MarcelloVolume:
20
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201307098
Date:
June, 2014
File:
PDF, 341 KB
english, 2014