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[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - System-level simulation of a micromachined electrostatically suspended gyroscope
Zhenni Qin,, Wenyuan Chen,, Feng Cui,, Qijun Xiao,, Weiping Zhang,Year:
2010
Language:
english
DOI:
10.1109/NEMS.2010.5592491
File:
PDF, 2.28 MB
english, 2010