[IEEE SIcon/01. Sensors for Industry Conference. First ISA/IEEE Sensors for Industry Conference - Rosemont, IL, USA (5-7 Nov. 2001)] SIcon/01. Sensors for Industry Conference. Proceedings of the First ISA/IEEE. Sensors for Industry Conference (Cat. No.01EX459) - Parameter design of the capacitive position sensing circuit for a differentially-driven electrostatic microactuator

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