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Summary Abstract: Characterization of AlN films produced by chemical vapor deposition using a novel metal azide precursor
Schulze, R. K.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575208
Date:
May, 1988
File:
PDF, 546 KB
english, 1988