Effect of Cl[sub 2]∕Ar gas mixing ratio on (Pb,Sr)TiO[sub...

Effect of Cl[sub 2]∕Ar gas mixing ratio on (Pb,Sr)TiO[sub 3] thin film etching behavior in inductively coupled plasma

Kim, Gwan-Ha, Kim, Chang-Il
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Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2187989
File:
PDF, 621 KB
english, 2006
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