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[IEEE IEEE SENSORS 2002 - Orlando, FL, USA (12-14 June 2002)] Proceedings of IEEE Sensors - Direct calculation of sensor performance in an FEA model [MEMS]
Krondorfer, R.H., Lommasson, T.C.Volume:
2
Year:
2002
Language:
english
DOI:
10.1109/icsens.2002.1037299
File:
PDF, 416 KB
english, 2002