Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry
Shinohara, Masanori, Cho, Ken, Matsuda, Yoshinobu, Inayoshi, Takanori, Kawazoe, Hiroki, Fujiyama, Hiroshi, Nitta, Yuuki, Nakatani, TatsuyukiVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3077278
File:
PDF, 739 KB
english, 2009