Effects of working pressure on physical properties of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2010 Vol. 28; Iss. 2

Effects of working pressure on physical properties of tungsten-oxide thin films sputtered from oxide target

Riech, I., Acosta, M., Peña, J. L., Bartolo-Pérez, P.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3333423
File:
PDF, 404 KB
english, 2010
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