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Material aspects for the diamond machining of submicron optical structures for UV-application
Brinksmeier, Ekkard, Riemer, Oltmann, Glabe, Ralf, Meier, AxelVolume:
7
Year:
2011
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/IJNM.2011.039963
File:
PDF, 558 KB
english, 2011