Removal of carbon deposits in narrow gaps by oxygen plasmas...

Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure

Ferreira, J. A., Tabarés, F. L., Tafalla, D.
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Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2746046
File:
PDF, 709 KB
english, 2007
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