Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure
Ferreira, J. A., Tabarés, F. L., Tafalla, D.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2746046
File:
PDF, 709 KB
english, 2007