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High-dose Al-implanted 4H-SiC p[sup +]-n-n[sup +] junctions
Kalinina, E., Kholujanov, G., Solov’ev, V., Strel’chuk, A., Zubrilov, A., Kossov, V., Yafaev, R., Kovarski, A. P., Hallén, A., Konstantinov, A., Karlsson, S., Adås, C., Rendakova, S., Dmitriev, V.Volume:
77
Year:
2000
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1320868
File:
PDF, 379 KB
english, 2000