Chemistry-induced intrinsic stress variations during the...

Journal of Applied Physics 2004 Vol. 96; Iss. 6

Chemistry-induced intrinsic stress variations during the chemical vapor deposition of polycrystalline diamond

Rajamani, Ashok, Sheldon, Brian W., Nijhawan, Sumit, Schwartzman, Alan, Rankin, Janet, Walden, Barbara L., Riester, Laura
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Volume:
96
Year:
2004
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1777811
File:
PDF, 541 KB
english, 2004
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