Influence of shifter errors on the printability of L/S...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1992 / 11 Vol. 10; Iss. 6

Influence of shifter errors on the printability of L/S structures using the alternated phase-shifting design: Simulations and experiments

Op de Beeck, Maaike
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Volume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586041
Date:
November, 1992
File:
PDF, 1.55 MB
english, 1992
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