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Atomic chlorine concentration measurements in a plasma etching reactor. I. A comparison of infrared absorption and optical emission actinometry
Richards, Albert D., Thompson, Brian E., Allen, Kenneth D., Sawin, Herbert H.Volume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339734
File:
PDF, 1.09 MB
english, 1987