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Influence of the substrate thickness and radio frequency on the deposition rate of amorphous hydrogenated carbon a-C:H films
Balachova, O. V., Alves, M. A. R., Swart, J. W., Braga, E. S., Cescato, L.Volume:
85
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.369681
File:
PDF, 365 KB
english, 1999