Diffuse-x-ray-scattering measurements of roughness on ion-etched multilayer interfaces
Schlatmann, R., Shindler, J. D., Verhoeven, J.Volume:
51
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.51.5345
Date:
February, 1995
File:
PDF, 310 KB
english, 1995