Preparation of platinum silicides by reactive sputtering of...

Journal of Applied Physics 1985 Vol. 57; Iss. 12

Preparation of platinum silicides by reactive sputtering of Pt in SiH4 plasma

Budhani, R. C., O’Brien, B. P., Doerr, H. J., Deshpandey, C. V., Bunshah, R. F.
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Volume:
57
Year:
1985
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.334824
File:
PDF, 611 KB
english, 1985
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