Effect of Pt on agglomeration and Ge out diffusion in Ni(Pt) germanosilicide
Jin, L. J., Pey, K. L., Choi, W. K., Fitzgerald, E. A., Antoniadis, D. A., Pitera, A. J., Lee, M. L., Chi, D. Z., Rahman, Md. A., Osipowicz, T., Tung, C. H.Volume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1977196
File:
PDF, 477 KB
english, 2005