Chemical mechanical planarization characteristics of WO[sub...

Chemical mechanical planarization characteristics of WO[sub 3] thin film for gas sensing

Seo, Yong-Jin, Kim, Nam-Hoon, Chang, Eui-Goo, Park, Jinseong, Ko, Pil-Ju, Lee, Woo-Sun
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Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1868612
File:
PDF, 640 KB
english, 2005
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