Chemical mechanical planarization characteristics of WO[sub 3] thin film for gas sensing
Seo, Yong-Jin, Kim, Nam-Hoon, Chang, Eui-Goo, Park, Jinseong, Ko, Pil-Ju, Lee, Woo-SunVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1868612
File:
PDF, 640 KB
english, 2005