[IEEE GaAs IC Symposium IEEE Gallium Arsenide Integrated Circuit Symposium. 18th Annual Technical Digest 1996 - Orlando, FL, USA (3-6 Nov. 1996)] GaAs IC Symposium IEEE Gallium Arsenide Integrated Circuit Symposium. 18th Annual Technical Digest 1996 - Slip defect generation on GaAs wafers during high temperature process: a thermoelastic study from a crystallographic viewpoint

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