High-energy Si implantation into InP:Fe

Nadella, Ravi K., Rao, Mulpuri V., Simons, David S., Chi, Peter H., Fatemi, M., Dietrich, H. B.

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Volume:

Year:

1991

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.349515

File:

PDF, 1.24 MB

english, 1991

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