The structural and optical properties of black silicon by...

Journal of Applied Physics 2014 / 11 Vol. 116; Iss. 17

The structural and optical properties of black silicon by inductively coupled plasma reactive ion etching

Steglich, Martin, Käsebier, Thomas, Zilk, Matthias, Pertsch, Thomas, Kley, Ernst-Bernhard, Tünnermann, Andreas
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Volume:
116
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4900996
Date:
November, 2014
File:
PDF, 5.71 MB
english, 2014
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