Silane thermometry in radio-frequency discharge plasma by...

Journal of Applied Physics 1986 Vol. 59; Iss. 6

Silane thermometry in radio-frequency discharge plasma by coherent anti-Stokes Raman spectroscopy

Hata, Nobuhiro, Matsuda, Akihisa, Tanaka, Kazunobu
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Volume:
59
Year:
1986
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.336415
File:
PDF, 468 KB
english, 1986
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