Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1989 / 9 Vol. 7; Iss. 5
Comparison of disilane and hydrogen adsorption on Si(111)-7×7
Uram, K. J.Volume:
7
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.584569
Date:
September, 1989
File:
PDF, 985 KB
english, 1989