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Origin of n-type conduction at the interface between epitaxial-grown layer and InP substrate and its suppression by heating in phosphine atmosphere
Ishikawa, Hideto, Miwa, Shiro, Maruyama, Toshiyuki, Kamada, MikioVolume:
71
Year:
1992
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.350857
File:
PDF, 885 KB
english, 1992