Thermal stability of thin ZrO[sub 2] films prepared by a...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 4

Thermal stability of thin ZrO[sub 2] films prepared by a sol-gel process on Si(001) substrates

Döscher, H., Lilienkamp, G., Iskra, P., Kazempoor, M., Daum, W.
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3425637
File:
PDF, 1.22 MB
english, 2010
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