Correlation between structure, stress and deposition parameters in direct current sputtered zinc oxide films
Kappertz, O., Drese, R., Wuttig, M.Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1517997
File:
PDF, 590 KB
english, 2002