Correlation between structure, stress and deposition...

Correlation between structure, stress and deposition parameters in direct current sputtered zinc oxide films

Kappertz, O., Drese, R., Wuttig, M.
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1517997
File:
PDF, 590 KB
english, 2002
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