Six-degree-of-freedom displacement measurement system using...

Review of Scientific Instruments 2000 Vol. 71; Iss. 8

Six-degree-of-freedom displacement measurement system using a diffraction grating

Kim, Jong-Ahn, Kim, Kyung-Chan, Bae, Eui Won, Kim, Soohyun, Kwak, Yoon Keun
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Volume:
71
Year:
2000
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1305816
File:
PDF, 622 KB
english, 2000
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