Monolithic coupling of a SU8 waveguide to a silicon...

Monolithic coupling of a SU8 waveguide to a silicon photodiode

Nathan, M., Levy, O., Goldfarb, I., Ruzin, A.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1625778
File:
PDF, 650 KB
english, 2003
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