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Probe diagnostics of supermagnetron plasma with applications of continuous and pulse-modulated rf electric fields
Kinoshita, Haruhisa, Fukushima, Fumihiko, Kando, Masashi, Nakagawa, Yukito, Tsukada, TsutomuVolume:
88
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1288700
File:
PDF, 323 KB
english, 2000