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Origin and evolution of sculptured thin films
Messier, Russell, Venugopal, Vijayakumar C., Sunal, Paul D.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582381
File:
PDF, 330 KB
english, 2000