Effect of oxygen plasma-induced current blocking on the...

Effect of oxygen plasma-induced current blocking on the performance of GaN-based vertical light-emitting diodes

Lee, Sang Youl, Choi, Kwang Ki, Jeong, Hwan Hee, Kim, Eun Joo, Song, June O., Jeon, Joon-Woo, Seong, Tae-Yeon
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3607315
File:
PDF, 655 KB
english, 2011
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