[IEEE 1998 International Conference on Ion Implantation...

[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Charge control in a ribbon beam high current ion implanter

Mehta, S., Walther, S.R., Che-Hoo Ng,, Angel, G., Weeman, J., Ukyo Jeong,, Piscitello, W.

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Volume:

Year:

1998

Language:

english

DOI:

10.1109/iit.1999.812195

File:

PDF, 498 KB

english, 1998

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