Comparison of electrical and chemical characteristics of...

Applied Physics Letters 2006 Vol. 89; Iss. 3

Comparison of electrical and chemical characteristics of ultrathin HfON versus HfSiON dielectrics

Pant, G., Gnade, A., Kim, M. J., Wallace, R. M., Gnade, B. E., Quevedo-Lopez, M. A., Kirsch, P. D., Krishnan, S.
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Volume:
89
Year:
2006
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2226991
File:
PDF, 342 KB
english, 2006
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