[IEEE 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Hose, CA, USA (2014.5.20-2014.5.23)] IEEE International Interconnect Technology Conference - Selective carbon nanotube growth in via structure using novel arrangement of catalytic metal
Wada, Makoto, Ito, Ban, Saito, Tatsuro, Nishide, Daisuke, Ishikura, Taishi, Isobayashi, Atsunobu, Katagiri, Masayuki, Yamazaki, Yuichi, Matsumoto, Takashi, Kitamura, Masayuki, Zhang, Li, Watanabe, MasYear:
2014
Language:
english
DOI:
10.1109/iitc.2014.6831881
File:
PDF, 1.07 MB
english, 2014