Thickness and composition of ultrathin SiO[sub 2] layers on...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 4

Thickness and composition of ultrathin SiO[sub 2] layers on Si

van der Marel, C., Verheijen, M. A., Tamminga, Y., Pijnenburg, R. H. W., Tombros, N., Cubaynes, F.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1701864
File:
PDF, 740 KB
english, 2004
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