Impact of pulse duration in high power impulse magnetron...

Thin Solid Films 2015 / 04 Vol. 581

Impact of pulse duration in high power impulse magnetron sputtering on the low-temperature growth of wurtzite phase (Ti,Al)N films with high hardness

Shimizu, Tetsuhide, Teranishi, Yoshikazu, Morikawa, Kazuo, Komiya, Hidetoshi, Watanabe, Tomotaro, Nagasaka, Hiroshi, Yang, Ming
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Volume:
581
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.11.076
Date:
April, 2015
File:
PDF, 2.39 MB
english, 2015
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