Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography
Märki, Iwan, Salt, Martin, Herzig, Hans Peter, Stanley, Ross, El Melhaoui, L., Lyan, P., Fedeli, J. M.Volume:
98
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1948507
File:
PDF, 498 KB
english, 2005